Tegal Corporation operates in the Special industry machinery sector. Tegal Corporation (Tegal) designs, manufactures, markets and services specialized plasma etch systems used primarily in the production of micro-electrical mechanical systems (MEMS) devices, such as sensors and accelerometers, as well as power devices. The Company's Deep Reactive Ion Etch (DRIE) systems are also employed in certain manufacturing techniques, such as three directional (3D) interconnect structures formed by intricate silicon etching, also known as Deep Silicon Etch (DSE) for so-called Through Silicon Vias (TSVs). On March 19, 2010, it completed the sale of the legacy Etch and PVD assets to OEM Group, Inc. In February 2011, the Company announced the sale of its Deep Reactive Ion Etch (DRIE) and certain related assets to SPP Process Technology Systems Ltd. In December 2011, the Company sold 30 patents from the nano-layer deposition (NLD) patent portfolio. In our complete report available for purchase the company is compared to: Strasbaugh, CVD Equipment Corporation and Greystone Logistics, Inc..